http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006210474-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f37bc8280d9fab4985ae5b7b7fd7fc6a |
| classificationIPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-35 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S5-028 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B7-00 |
| filingDate | 2005-01-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_43070c19823b247b62b558414202e567 |
| publicationDate | 2006-08-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2006210474-A |
| titleOfInvention | Manufacturing method of semiconductor laser device |
| abstract | PROBLEM TO BE SOLVED: To provide a semiconductor laser device manufacturing method, particularly in a semiconductor laser device having a protective film on both end faces of a resonator, with little element deterioration due to COD, high output and high reliability irrespective of the film quality of the protective film. It is to be done. The resonator end faces 1a and 1b are subjected to plasma treatment under predetermined conditions, for example, with low ion energy and high ion current density, thereby causing contaminants and natural oxide layers on the resonator end faces 1a and 1b generated during cleavage. In addition, the resonator end faces 1a and 1b are modified so that oxidation is suppressed. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11075614-B2 |
| priorityDate | 2005-01-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2244 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419556224 |
Total number of triples: 17.