Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_03d0f52bb4069f8a19d70dcfb697c67a |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-031 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0007 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-028 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-28 |
filingDate |
2004-12-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4d5c11a3d1f34c70d652adfe407b0655 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_430cf2fd345cba932bcef0c8ec42e414 |
publicationDate |
2006-07-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
JP-2006184326-A |
titleOfInvention |
Pattern forming material, pattern forming apparatus and permanent pattern forming method |
abstract |
PROBLEM TO BE SOLVED: To obtain a resist surface having a good shape and capable of forming a finer pattern by using a highly transparent substance as a support for the purpose of forming a permanent pattern such as a solder resist. A forming material, a pattern forming apparatus provided with the pattern forming material, and a permanent pattern forming method using the pattern forming material. SOLUTION: At least a photosensitive layer is provided on a support, the support has a haze value of 5.0% or less, and the photosensitive layer comprises a binder, a polymerizable compound, a photopolymerization initiator, thermal crosslinking. A pattern forming material comprising at least an agent and a hetero-fused ring compound. [Selection figure] None |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103275627-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103275627-A |
priorityDate |
2004-12-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |