| abstract |
PROBLEM TO BE SOLVED: To provide a microfluidic device capable of joining substrates without causing distortion and breakage and analyzing a microfluid flowing in a flow path by infrared spectroscopy, a manufacturing method thereof, and the microfluidic device A chemical analyzer is provided. SOLUTION: A flow path 3 is formed on one surface of a quartz substrate 1, and an infrared reflection film 4 is formed on the surface of the flow path 3. Further, a silicon oxide film 6 is formed on one surface of the sapphire substrate 2 in which the through-holes 5 are formed at positions matching the respective terminal portions of the flow path 3 of the substrate 1. Then, the surface of the substrate 1 where the flow path 3 is formed and the surface of the substrate 2 where the silicon oxide film 6 is formed are overlapped, and the substrate 1 and the silicon oxide film 6 of the substrate 2 are dissolved by hydrofluoric acid. By bonding, the substrate 1 and the substrate 2 are bonded to form a microfluidic device. [Selection] Figure 2 |