http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006176574-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2f8cfa5aee4410611b5c562275c9f8e3 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-033 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F6-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-18 |
| filingDate | 2004-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_afea9eb3d89095250dcff0f4d34a286f |
| publicationDate | 2006-07-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2006176574-A |
| titleOfInvention | Method for producing resin solution for photoresist |
| abstract | PROBLEM TO BE SOLVED: To obtain a photoresist resin solution capable of obtaining a photoresist resin solution by a simplified process without generation of insoluble matter. The method for producing a resin solution for a photoresist according to the present invention comprises a repeating unit A containing a group that is partly eliminated by an acid and becomes alkali-soluble, and a repeating unit containing an alicyclic skeleton having a polar group. A method for producing a solution of a resin for photoresist containing at least B with a mixed solvent of propylene glycol monomethyl ether acetate and propylene glycol monomethyl ether, wherein the polymer is precipitated in a poor solvent after polymerization, and the separated wet crystals are propylene After dissolving in glycol monomethyl ether and removing low-boiling components by distillation, propylene glycol monomethyl ether acetate is added to obtain a solution of the photoresist resin. [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014021454-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007146022-A |
| priorityDate | 2004-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 202.