http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006165421-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c5520dd38cc403678d9f91e0b0ee95fb |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S5-323 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S5-223 |
| filingDate | 2004-12-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_20b681d9984f162848ed273dc5289705 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_75fcd09146efb4ad72e8543aa83b1edf |
| publicationDate | 2006-06-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2006165421-A |
| titleOfInvention | Nitride semiconductor laser device and manufacturing method thereof |
| abstract | PROBLEM TO BE SOLVED: To form a ridge structure having a desired size and shape when etching a nitride semiconductor by using a dry etching apparatus, and to produce a nitride semiconductor laser element with good characteristics without variation in various characteristics. And it aims at providing the manufacturing method. The present invention relates to an atom / molecule composed of an element contained in an etching gas in an emission spectrum emitted from plasma generated in a reaction chamber of an etching apparatus, or an element contained in an etching gas and a nitride semiconductor. Etching can be accurately stopped at a desired position by detecting light of a specific wavelength emitted by molecules composed of elements constituting the thin film and observing temporal changes in the intensity of the light. [Selection] Figure 3 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007207798-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8565278-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2258029-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9543218-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101606948-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011517070-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20100127214-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014072425-A |
| priorityDate | 2004-12-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 35.