http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006135235-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_73ebc284a55d5daf0e209d6186c9e65c |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3122 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3127 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3125 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0212 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66545 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66583 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-18 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-78 |
| filingDate | 2004-11-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2bdc04768aa9dc9b23fb3aac6046fade |
| publicationDate | 2006-05-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2006135235-A |
| titleOfInvention | Manufacturing method of semiconductor device |
| abstract | PROBLEM TO BE SOLVED: To provide a method for manufacturing a semiconductor device which is low cost and simplified in a dummy gate pattern forming process. A method of manufacturing a semiconductor device, in which a mask material application step of applying a mask material 16 on a substrate 10 is patterned, the mask material 16 is patterned into a predetermined shape, and a recess H1 is formed in the mask material 16. A recess forming step, an arrangement step of disposing the functional liquid in the concave portion H1, a drying step of drying the functional liquid disposed in the concave portion, a baking step of the functional film formed by the drying step, and the mask material And a pattern forming step of forming a dummy gate pattern 20 made of the functional liquid constituent material by removing 16. [Selection] Figure 1 |
| priorityDate | 2004-11-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 26.