| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-18 |
| filingDate |
2004-10-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d5788eb47c649c7d10534ceed94ff9cc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bad9357e3e7579904cee788becdc26f8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3cdc5676007ef9b809bd4bbc90547924
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9d1c294a98f93161b5852e8b601c0f25
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4fa294e0d06fc662543460e42ed5c639 |
| publicationDate |
2006-05-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2006124409-A |
| titleOfInvention |
Surface hydrophobizing composition, surface hydrophobizing method, semiconductor device and manufacturing method thereof |
| abstract |
PROBLEM TO BE SOLVED: To provide a surface hydrophobizing composition, a surface hydrophobizing method, a semiconductor device and a manufacturing method thereof. The surface hydrophobizing composition of the present invention comprises (A) a silane compound having a functional group and (B) an alcohol solvent having 4 to 8 carbon atoms. [Selection figure] None |
| priorityDate |
2004-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |