| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_03d0f52bb4069f8a19d70dcfb697c67a |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate |
2004-10-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2b0d8b3c65496576419847c67820e2b8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f9374f4123bd8b1b64d636e0d35cca04 |
| publicationDate |
2006-04-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2006113135-A |
| titleOfInvention |
Positive resist composition and pattern forming method using the same |
| abstract |
PROBLEM TO BE SOLVED: To provide a positive resist composition giving an excellent pattern shape capable of suppressing bottoming and surface roughness of the top and obtaining a rectangular top, and a pattern forming method using the same. (A) a resin whose solubility in an alkaline developer is increased by the action of an acid; (B) a compound that generates an acid upon irradiation with actinic rays or radiation; A positive resist composition comprising (C) an organic solvent containing an aromatic group and not containing a basic nitrogen atom, and (D) an organic solvent containing no aromatic group, and the use thereof Pattern formation method. [Selection figure] None |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008191644-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007041313-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8007981-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9244355-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2016181722-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006219555-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101451616-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011175270-A |
| priorityDate |
2004-10-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |