| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6b822ee046eb6c45d1e3bd9ce9c1782e |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-268
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-1368
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-1345
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786 |
| filingDate |
2005-08-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b82ddd371411164b11de10f495cac7e9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7dec4d1ff9bbf4d655bc09a747cbae06 |
| publicationDate |
2006-04-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2006100804-A |
| titleOfInvention |
Laser processing apparatus, laser processing method, and semiconductor device manufacturing method |
| abstract |
【Task】 It is an object to reduce the number of scans of a linear laser, reduce the time required for laser annealing, and reduce the manufacturing process, manufacturing time, and manufacturing cost of a semiconductor device. [Solution] In the present invention, high-temperature gas is locally sprayed so as to overlap the irradiation surface of the linear laser beam. The linear laser beam is obtained by making a laser beam emitted from a laser oscillator enter a lens. The high-temperature gas is obtained by heating the gas compressed by the gas compression pump with a nozzle heater. The heated gas is ejected so as to overlap the irradiation surface of the linear laser beam. [Selection] Figure 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101563136-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8487342-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008112985-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019023750-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013232451-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009010356-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101442522-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009194370-A |
| priorityDate |
2004-09-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |