| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_cdd94f212dc7aef02fc1dcf28fa9b4fd |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-509
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-52 |
| filingDate |
2004-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8d1417d46e6f7febba3aa7e22133820f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_29b7bdd064287104e9a1f814779ccd65
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e81c27e5ebc926dc51c3e0e79f258c66 |
| publicationDate |
2006-04-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2006088006-A |
| titleOfInvention |
Surface treatment equipment |
| abstract |
PROBLEM TO BE SOLVED: To suppress the amount of accumulation on an electrode surface and contamination inside an apparatus by removing dust generated by contact with an electrode, and ensure the stability of surface treatment. In this surface treatment apparatus, a pair of electrodes are arranged so as to form a discharge space with their discharge surfaces facing each other, and generate a high-frequency electric field in the discharge space, and a pair of electrodes in the discharge space And a holding mechanism for holding the moving body so as to be relatively moved while being in close contact with at least one of the electrodes. The surface treatment apparatus includes a cleaning unit that removes dust on the electrode-side surface of the moving body. [Selection] Figure 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2023282123-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012205977-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112792059-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112792059-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010094577-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I808730-B |
| priorityDate |
2004-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |