| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F212-24 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F212-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
| filingDate |
2004-07-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_58a5fc56afea2904e048289a017ae35e |
| publicationDate |
2006-01-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2006018017-A |
| titleOfInvention |
Chemically amplified resist composition and resist pattern forming method |
| abstract |
PROBLEM TO BE SOLVED: To provide a chemically amplified resist composition and a resist pattern forming method which are excellent in fine resolution and can improve at least one of LER and SW of a resist pattern. A resist composition comprising a resin component (A) whose alkali solubility is changed by the action of an acid, and an acid generator component (B) that generates an acid upon exposure, having a high boiling point of 220 ° C. or higher. A chemically amplified resist composition comprising a boiling point solvent component (X). [Selection figure] None |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010240868-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101039545-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007206425-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8133653-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2007088884-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8007981-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011170151-A |
| priorityDate |
2004-07-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |