http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006018015-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0395 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
| filingDate | 2004-07-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0ec445bab0c5a156aba237a0e8e0c2ec http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_98f013b9fbfadcb1479fd616f0a75342 |
| publicationDate | 2006-01-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2006018015-A |
| titleOfInvention | Positive resist composition and resist pattern forming method |
| abstract | A resist pattern having a high resolution, a wide depth of focus, and a good shape is obtained. A resin component (A) whose alkali solubility is changed by the action of an acid and an acid generator component (B) are contained, and the component (A) is represented by the following general formula (I): A resin component (A1) having a structural unit (a3) having a unit (a1) and an acid dissociable, dissolution inhibiting group composed of a tertiary alkyl group; the structural unit (a1); the structural unit (a3); A positive resist composition comprising a resin component (A2) having a structural unit (a4) having a crosslinking group represented by the general formula (III). [Chemical 1] (In the formula, R represents a hydrogen atom or a methyl group, and m represents an integer of 1 to 3.) [Chemical 2] (R 3 and R 4 are each independently a lower alkyl group, n is an integer of 1 to 3, and A represents a single bond or an n + 1 valent organic group.) [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007206425-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010128369-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8133653-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2007088884-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101498304-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010128368-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010128370-A |
| priorityDate | 2004-07-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 203.