http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005517972-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-106 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61P29-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/A61P29-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09 |
| filingDate | 2003-01-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2005-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2005517972-A |
| titleOfInvention | Positive photoimageable bottom antireflection coating |
| abstract | The present invention relates to a light-absorbable photoimageable and aqueous developable comprising a polymer containing at least one unit having an acid-sensitive group and at least one unit having a light-absorbing chromophore and a photoacid generator. The present invention relates to a novel positive antireflection film composition. The present invention further relates to methods of using such compositions. The present invention also provides a composition for a novel positive antireflection film capable of forming a light-absorbing photoimage and capable of aqueous alkali development, comprising a polymer containing at least one unit having an acid-sensitive group, a dye and a photoacid generator. Also related to things. The invention further relates to methods of using such compositions. Furthermore, the present invention is a novel method for forming a positive type image using a positive type photoresist and a novel composition for a positive type antireflection film capable of forming a photoimage and capable of being developed in water. It also relates to said method, wherein the membrane composition comprises a polymer comprising acid sensitive groups. The invention further relates to such compositions. The present invention also relates to a method of imaging a composition for an antireflective coating that can be photoimaged. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007256928-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010256859-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8741542-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011065594-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014174428-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008170943-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012108182-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013083947-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011113065-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012518812-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011502276-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009534710-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010250280-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015507212-A |
| priorityDate | 2002-01-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 225.