| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32522
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01Q7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01Q21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32128
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32082
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-321
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32174 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01Q7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F4-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01Q21-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate |
2002-10-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2005-03-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2005506660-A |
| titleOfInvention |
Plasma generating apparatus, method, and RF driving circuit |
| abstract |
An RF driver circuit and orthogonal antenna assembly / configuration are disclosed as part of a method and system for generating a high density plasma. The antenna assembly (105, 115, 110, 120) can be driven by any RF generator / circuit (125, 130) with appropriate impedance matching to provide a low impedance. It is. The disclosed RF driver circuit uses a switching type amplifier element to provide a low output impedance. The disclosed low output impedance RF driver circuit eliminates the need for a matching circuit to interface with the intrinsic impedance change coupled to the plasma. Also disclosed is the selection of capacitance or inductance values for providing tuning to the RF plasma source. [Selection] Figure 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110828275-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012074587-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102225954-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200016779-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006524422-A |
| priorityDate |
2001-10-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |