http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005340079-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7157e693f334faf24e6a17be49c08aa2 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 |
| filingDate | 2004-05-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b7f86f7488a650e27cc303fedc6074fd http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2d7c0e8a53920c279ed7cfae52d31a99 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b04a58219f8c47ed9c650b652f31fd0e |
| publicationDate | 2005-12-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2005340079-A |
| titleOfInvention | Microwave plasma generator |
| abstract | A long line-shaped plasma can be generated. From a waveguide 1, a microwave generation source 3, microwave supply paths 9, 10 for supplying microwaves from the microwave generation source to the waveguide, a gas supply source 5, and a gas supply source And a gas supply pipe 4 for supplying a gas to the waveguide. The waveguide is a flat rectangular waveguide formed so that its width is greater than its thickness in a cross section perpendicular to its central axis, and the width a of the waveguide is the wavelength λ 0 of the microwave in vacuum. And for the microwave wavelength λ g inside the waveguide, [Expression 1] It is selected to satisfy, and the wavelength lambda g of the microwaves inside the waveguide, is selected to be longer than the length of the to be generated plasma. Furthermore, plasma generating means 2 and 4 for converting an electromagnetic field generated inside the waveguide into gas ionization energy are provided. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2008018159-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008276946-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010261078-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2013099934-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2008018159-A1 |
| priorityDate | 2004-05-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 46.