| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4d72711e97d894c55af805c9de2053ab |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-111
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-106 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0395
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03C1-492
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate |
2005-03-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_55f92325c673ef6179f5731c90d3689b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7367c71be09f5b8c5aedcde8a1803d61 |
| publicationDate |
2005-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2005258438-A |
| titleOfInvention |
Cyanoadamantyl compounds and polymers and photoresists containing the same |
| abstract |
Cyanoadamantyl compounds and polymers, and photoresists containing the same United States Patent Application 20070274305 Kind Code: A1 Provided are cyanoadamantyl compounds, polymers containing polymerized units of such compounds, and photoresist compositions containing such polymers. . Preferred polymers of the present invention are used in photoresists imaged at wavelengths shorter than 250 nm, such as 248 nm and 193 nm. [Selection] None |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8802349-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005314383-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013028820-A |
| priorityDate |
2004-03-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |