http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005230665-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9df90d7822cc480ce12c480f4089e229 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D3-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D7-24 |
| filingDate | 2004-02-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_31b76fa2c9be014004e5089aa4c77c01 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_752306ff94385e08edd4f50f7e81caf0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b2bd05994465e19e4ddc544409139361 |
| publicationDate | 2005-09-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2005230665-A |
| titleOfInvention | Monomolecular film formation method |
| abstract | PROBLEM TO BE SOLVED: To provide a uniform monomolecular film in an arbitrary range from a large area to a micro area on a substrate surface capable of hydrogen termination such as silicon, diamond, germanium, silicon carbide, etc. Provided is a method of forming a monomolecular film capable of forming a two-dimensional array structure by forming a plurality of types of monomolecular films in a predetermined pattern at a predetermined location. A material having an unsaturated bond, such as 1-octadecene, is applied to the surface of a hydrogen-terminated substrate, and the substrate is heated in a non-oxygen atmosphere at 40 to 200 ° C. A method for forming a monomolecular film comprising forming a monomolecular film on a substrate surface. [Effect] Large area, fine structure, and two-dimensional array of monomolecular coating can be performed on the same substrate by a very simple process. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008169080-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10983142-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20210040566-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102290101-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011068094-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020086700-A1 |
| priorityDate | 2004-02-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 59.