http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005136345-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_366802749d278c1447279515ff2967f3 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1af8df51ce24ca931ae718fb747f6aa0 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate | 2003-10-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_65061e6cdea384f37ca7dba0e3e20b38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e8a717176f1a12e9c3b3ceacb09c5ca1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1d2106d02b8b2c3e0b76188b438f44b3 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_84794dddd6e94e1d1d13d79071be338d |
| publicationDate | 2005-05-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2005136345-A |
| titleOfInvention | Substrate processing method, substrate processing apparatus, measuring apparatus, and data control method |
| abstract | A substrate processing method and a substrate processing apparatus capable of satisfactorily removing a resist from the surface of a substrate without damaging the surface of the substrate, and a measuring apparatus and a data control method for realizing such a substrate processing apparatus. provide. When a measurement data calculation unit 61 calculates the number of residues attached to the surface of a substrate based on a detection signal from a measurement unit 14, a data comparison unit 63 stores in the reference data storage unit 62. By referring to the stored reference data, the number of SPM reciprocating scans corresponding to the number of residues is obtained. Then, the data of the number of SPM reciprocating scans is given to the cleaning control unit 57. The cleaning control unit 57 changes the number of SPM reciprocating scans determined in the recipe to the number of SPM reciprocating scans corresponding to the data given from the data comparison unit 63, and in the chemical solution cleaning unit 13 according to the changed recipe. Control for processing. [Selection] Figure 6 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009218548-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109661718-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109661718-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8901012-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020150198-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7166966-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I775032-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020188992-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015173209-A |
| priorityDate | 2003-10-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 38.