| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5b697aa5d3346981b6c6de88dcb0d50d |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32136 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F4-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00595
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3213 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F4-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate |
2004-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c94e1957972d50f1f73327ef3d417ff0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f194926e58ada7dc5ffedcc57cefe52a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5f9af4326f49e0b38657c09010d2d673
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2865aa9b4ddf0f4d100ff46268b30dcc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aee18e949dcc91f0c49e6624bdcc5870 |
| publicationDate |
2005-04-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2005105416-A |
| titleOfInvention |
Selective isotropic etching process of titanium-based materials |
| abstract |
PROBLEM TO BE SOLVED: To provide an etching process of a titanium base layer in a semiconductor or micromachine system device. A process for etching a sacrificial layer in a mechanism, wherein the mechanism is exposed to a plasma derived from nitrogen trifluoride for etching the sacrificial layer. The process exhibits selectivity so that etching titanium nitride and titanium does not affect the adjacent silicon oxide or aluminum layer. Process applications include the formation of integrated circuit features and MENS features. [Selection] Figure 9 |
| priorityDate |
2003-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |