http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005079239-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d93502a23a72b56472bc75854cfe7c60 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate | 2003-08-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b159307681fe01f7ee6b3c5293474175 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ed46cbdbd0d8ac4257cd709c63d06989 |
| publicationDate | 2005-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2005079239-A |
| titleOfInvention | Semiconductor substrate cleaning liquid and cleaning method |
| abstract | 【Task】 Provided is a semiconductor substrate cleaning liquid that has been subjected to chemical mechanical polishing that has excellent cleaning properties. [Solution] A cleaning liquid for cleaning a semiconductor substrate that has been subjected to chemical mechanical polishing treatment, wherein the cleaning liquid is mainly composed of a fluorinated hydrocarbon having 4 to 6 carbon atoms represented by the following formula (I): Characteristic semiconductor substrate cleaning liquid. Rf1-CHF-CF2-Rf2 (I) (Rf1 and Rf2 are each independently a perfluoroalkyl group, and Rf1 and Rf2 may be bonded to each other to form a ring.) A method of cleaning a semiconductor substrate, comprising the step of bringing the semiconductor substrate cleaning liquid maintained at 35 ° C. or higher into contact with the surface of the semiconductor substrate polished with a chemical mechanical abrasive to remove metal impurities and particle contamination. [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011139004-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114920465-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2007052545-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8409360-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018022861-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100954313-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7267516-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008213113-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007123776-A |
| priorityDate | 2003-08-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 168.