http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005048128-A

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_cebc9740ef706cde29e885504f274ffa
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-10
filingDate 2003-07-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_226b6375c16cb8d550353e4efd5fc7ac
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fec26edb11760d28821b91da9c0ba128
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a9cb2c912352424ee44b2fdd2fa2a30d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b05339345fa5bddcc19a0c344dd88b50
publicationDate 2005-02-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2005048128-A
titleOfInvention (Co) polymer, production method, resist composition, and pattern formation method
abstract PROBLEM TO BE SOLVED: To provide a polymer useful as a constituent resin such as a resist, a method for producing the same, a DUV excimer laser lithography, etc., high sensitivity, high resolution, little generation of microgel, and line edge roughness. The present invention provides an excellent resist composition having a small size and a pattern forming method using the resist composition. The (co) polymer of the present invention comprises a structural unit represented by the following formula (1): A resist pattern is formed using a resist composition containing the resist polymer. [Selection figure] None
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007279662-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8236971-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2007037213-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2007037213-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008081404-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101550947-B1
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7687219-B2
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009107327-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I396050-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022215423-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8637623-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7750101-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5562826-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7834114-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101169313-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4740951-B2
priorityDate 2003-07-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419545871
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410574545
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421243580
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421243559
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID77921
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393661
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21225789
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID20781148
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID25046
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448674543
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID424437737
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID79130
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420241773
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451610079
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419518509
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421243763
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14471
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID409229922
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419530063
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12576681
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15290
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22168816
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393685
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID467301493
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID76724
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID467301492
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID523077
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID467301409
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID467307656
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11583
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8054
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID422006393
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458394323
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID467301407
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415712769
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415755888
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21946952
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID93820
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393636
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID467301413
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414862845
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415760691
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393770
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID467301412
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411293782
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21863807
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450953825
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419515203
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421324251
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID87714449
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID57740453
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10558
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458392451
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458394324
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14473885
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID467300734
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8144
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559499
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID467300732
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22051850
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10560
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21959673
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID467301239
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419526254
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID62453
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID467301238
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID64677
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10953
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID75110
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID422862442
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452585505
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7462
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421135223
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21959675
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16760159
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10405
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1031
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456370357
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421152469
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2737137
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID408511568
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21245395
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450466897
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414035384
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419569655
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22228790
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419539909
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6339
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419509562
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3715291
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419538065
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420119303
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411285486
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419537837
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453174394
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9837566
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419531062
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410411472
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454033071
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420263647
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11856523
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512438
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID467659500
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID17587
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16701408
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID423671490
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414866972
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9550
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID66624693
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8012
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415767689
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419890815
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7895
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419517738
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8452
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421173564
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID4132186
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID413990170
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8917
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419477900
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415757774
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13528
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID522220
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11729320
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456171974
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454973655
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419531968
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9813645
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450653186
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID75763

Total number of triples: 163.