http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2004503082-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76897 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-311 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76802 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-60 |
| filingDate | 2001-07-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2004-01-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2004503082-A |
| titleOfInvention | An etchant with selectivity for doped silicon oxide on top of undoped silicon oxide and silicon nitride, methods of using the etchant, and structures formed thereby. |
| abstract | x is an integer of 2 to 5, y is an integer of 1 to 4, and x + y is 6. The etching agent composed of C 2 H x F y selects doped silicon dioxide over undoped silicon dioxide or silicon nitride. Etching. Thus, the C 2 H x F y dry etching method using an etchant consisting of undoped silicon dioxide or silicon nitride may be used as an etch stop material. C 2 H x F y is a basic etchant, or may be used as additives other etchants and mixed etchant. Also disclosed is a semiconductor device (10) that includes a structure patterned according to the etchant of the present invention or the method of the present invention. Specifically, the present invention relates to a doped silicon oxide structure (24) having substantially vertical sidewalls (34) and an undoped silicon dioxide or silicon nitride structure exposed adjacent to the sidewalls (34). Comprising a semiconductor device (10). |
| priorityDate | 2000-07-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.