| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bf334efdc57a817d413aef1d9f5e9d80 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24D3-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24D3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24D11-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 |
| filingDate |
2003-05-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e5e0c97fbf6e2b884755dbd16fe98228
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dd10d935d2218cfb5ff46ba1e1daeb2b |
| publicationDate |
2004-12-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2004337992-A |
| titleOfInvention |
Fixed abrasive polishing pad and method for polishing silicon wafer using fixed abrasive polishing pad |
| abstract |
An object of the present invention is to provide a fixed abrasive polishing pad and a method for polishing a silicon wafer using the fixed abrasive polishing pad, which prevent removal of abrasive grains and improve polishing efficiency. A fixed abrasive polishing pad for pressing a silicon wafer and polishing the silicon wafer by a relative movement with the silicon wafer while supplying an alkaline solution as a polishing liquid between the silicon wafer and the fixed abrasive. The grain polishing pad is composed of a polyurethane binder comprising at least a hard segment and a soft segment and abrasive grains having a hydroxyl group, or abrasive grains having a hydroxyl group. % To 60% or less. [Selection] Figure 2 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006231436-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8167690-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008546167-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008168416-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7349975-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007220974-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7951716-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9126303-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1820603-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8257153-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103199014-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8476328-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006231429-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8318298-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007287879-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006093655-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8715035-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2105255-A1 |
| priorityDate |
2003-05-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |