http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2004281771-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c5520dd38cc403678d9f91e0b0ee95fb |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-268 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336 |
| filingDate | 2003-03-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4a99297f3c6caaf6f1a817a6f8e49fa7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_23fcded19af5cf46cc27bcb1b7bbaee7 |
| publicationDate | 2004-10-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2004281771-A |
| titleOfInvention | Method and apparatus for crystal growth of semiconductor thin film and method of manufacturing thin film transistor |
| abstract | An object of the present invention is to control the position of large crystal grains obtained when crystallizing a semiconductor thin film by lateral growth. A semiconductor thin film (13) has a V-shaped point at a boundary between a melting region (24) and a non-melting region (34) of the semiconductor thin film (13). By melting the semiconductor thin film 13 so as to have the shape portion 16, the large crystal grains 19 b are laterally formed in the direction substantially parallel to the main surface of the base material toward the inside of the melting region 24 from the tip 17 of the pointed portion 16. Let it grow. [Selection diagram] FIG. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015127036-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007208044-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9466402-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012256879-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9302348-B2 |
| priorityDate | 2003-03-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 22.