| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D61-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D61-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-38 |
| filingDate |
2002-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a993a44800699d67214184e015055552 |
| publicationDate |
2004-07-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2004195427-A |
| titleOfInvention |
Filtration method for materials for manufacturing electronic components |
| abstract |
An object of the present invention is to provide a method of filtering a material for manufacturing an electronic component, which can more reliably remove fine particles in the material for manufacturing an electronic component in a short time. A particulate material in an electronic component manufacturing material is removed by filtering the electronic component manufacturing material with a filter at a filtration pressure of 98 kPa or more and 392 kPa or less. [Selection diagram] None |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009282080-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11429018-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180115786-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015011292-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5071107-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10088752-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7705115-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2006121162-A1 |
| priorityDate |
2002-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |