http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2004168964-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-023 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G8-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G8-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2002-11-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_918b29368c80a2d3b7671d4534129f20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_978f49c2f1b05cb418cd2e79082f4a79 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_07695a6ae029144c658cbdc3a60dadb3 |
| publicationDate | 2004-06-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2004168964-A |
| titleOfInvention | Novolak resin, method for producing the same, and positive photoresist composition |
| abstract | A method for synthesizing a novolak resin having a good resin yield without producing unreacted products or low-molecular-weight oligomers, a novolak resin having a composition ratio according to a charge ratio, a narrow dispersity, and a wide total DOF margin A resist composition is provided. A novolak is obtained by polycondensing a novolak oligomer A having a polystyrene equivalent mass average molecular weight (Mw) of 1500 to 5000 and a novolak oligomer B having a Mw of 500 to 2000 with an aldehyde or ketone in the presence of an acid catalyst. A method of synthesizing a resin, a novolak resin synthesized by the method, and a positive photoresist composition comprising the novolak resin and a naphthoquinonediazidosulfonyl group-containing compound. [Selection diagram] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017111455-A |
| priorityDate | 2002-11-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 230.