| abstract |
【Task】 Provided is a radiation-sensitive resin composition which is capable of forming a transparent cured resin pattern having no coloration, having high transmittance to visible light, and having sufficient solvent resistance, and capable of forming a transparent cured resin pattern having a good shape. [Solution] As the binder resin, a copolymer (A) containing a structural unit (a1) derived from an unsaturated carboxylic acid and a structural unit (a2) derived from an unsaturated compound having an oxetanyl group (excluding an unsaturated carboxylic acid). ), A radiation-sensitive resin composition comprising a quinonediazide compound (B) and a salt comprising a hexafluoroantimonate anion and an onium cation as a cationic polymerization initiator (C). [Selection diagram] None |