http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2004083289-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1dffa57ae641849a5f0c50ea8ab5ea0c |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B33-02 |
| filingDate | 2002-08-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_53cc32b14557bc579e94cf12b589712f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_16827de49af1b35b588063d01bf817c9 |
| publicationDate | 2004-03-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2004083289-A |
| titleOfInvention | Ultra-low resistance polycrystalline silicon and its manufacturing method |
| abstract | [PROBLEMS] To eliminate the problem that cracks occur in an ingot when producing a polycrystalline silicon ingot obtained by directly solidifying with a crucible, and to prevent internal stress from being released after production to cause cracks and cracks. A sound polycrystalline silicon ingot having an outer diameter of 120 mm or more and a specific resistance of less than 1 mΩ · cm can be easily manufactured. SOLUTION: Molten silicon to which a large amount of boron doping material is added is stirred and melted by relatively high-speed and intermittent rotation of a crucible, solidified after holding this intermittent rotation for a certain period of time before solidification starts, and further solidified after solidification. By performing the predetermined reheating, a large-sized polycrystalline silicon ingot having an outer diameter of, for example, 380 mm can be obtained without an internal crack. [Selection diagram] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101993933-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20130108147-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9074298-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007063048-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109136855-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011140241-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109825877-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015106652-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109825877-A |
| priorityDate | 2002-07-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 25.