| abstract |
A plasma processing apparatus for forming a carbon coating on the inner surface of a plastic container using high-frequency plasma, capable of simplifying an apparatus, simplifying an operation method, reducing operation time, and forming a more uniform carbon coating. And a method for producing a carbon-coated plastic container. An external coil electrode having a shape substantially similar to the outer shape of a plastic container on which a carbon film is formed and having a size inside the plastic container and capable of installing the plastic container, and a plastic container installed in the external coil electrode A medium gas supply port which is opened at a position corresponding to the base portion of the container and supplies a medium gas into the container, a vacuum container accommodating an external coiled electrode provided with gas supply means and gas exhaust means, and an external coil A matching device and a high-frequency power supply connected to the electrode are included as constituent elements. [Selection diagram] Fig. 1 |