| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ad78b36d08c20f06075145cc1caf3ac8 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C41-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C43-13
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C41-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F9-10 |
| filingDate |
2002-06-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_065e3175c2b01520cae16f16132e0dc2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9e042cb23ac17d636873b01873e460f5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bbb706e19c6ded17e62f9e61699d8a1d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_85e6923b7472d4098578ff972ac4e1a5 |
| publicationDate |
2004-01-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2004027337-A |
| titleOfInvention |
Raw material for chemical vapor deposition and method for producing thin film using the same |
| abstract |
An object of the present invention is to provide a bismuth CVD raw material suitable for producing a bismuth-containing composite oxide thin film by a CVD method and a method for producing a bismuth-containing composite oxide thin film using the same and having excellent composition controllability. A raw material for chemical vapor deposition containing a bismuth compound represented by the following general formula (I). Embedded image [Selection diagram] None |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7501153-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2006043418-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101195736-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015157766-A |
| priorityDate |
2002-06-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |