| abstract |
(57) [Summary]nThe present invention provides systems and methods for selectively removing one or more organics, and preferably one or more inorganic contaminants, from a plating bath. More specifically, the method of the present invention uses an energy source alone or in combination with a chemical oxidant and catalyst to regenerate the electroplating bath after appropriate chemical adjustments. Oxidation of organic contaminants in the plating bath to a level that can be reused. The oxidation treatment method can be a continuous treatment or a batch treatment in which the end point of the oxidation step is detected by a sensor using a single pass. If desired, residual organics and chloride ions in the bath are removed from the solution by a chemical or physical adsorption treatment. Inorganic contaminants are removed from the electroplating bath by selective ion exchange resin or electrodialysis, while particulates and suspended colloid particles are removed by filtration before recycling the treated plating bath. |