| abstract |
PROBLEM TO BE SOLVED: To propose a member inside a plasma processing vessel excellent in plasma erosion resistance and an advantageous production method thereof. SOLUTION: The surface of a base material is interposed with a single layer of Y 2 O 3 thermal spray coating or a metal coating, a coating such as Al 2 O 3 or Y 2 O 3, and then Y is formed as a top coat thereon. A member covered with a multilayer composite layer provided with a 2 O 3 thermal spray coating and a method for producing the same. |