http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003315996-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_129e393582e6bdf4029baf2206522f45 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-027 |
| filingDate | 2002-04-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6e25808046765aa54d3003c70963326a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_75f8f9f1af4fedad94692732cb64c647 |
| publicationDate | 2003-11-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2003315996-A |
| titleOfInvention | Photosensitive ceramic composition and developing method thereof |
| abstract | (57) [Summary] (With correction) [Problem] A high aspect ratio and high definition via hole can be formed by using a photolithography method, and a state after the formation of the via hole is an appropriate state in a post-process. In addition, a photosensitive ceramic composition is provided in which a sheet which has been sufficiently photo-cured to a deep portion is developed with high precision, and has the same elongation, tensile elasticity and strength as ordinary non-photosensitive green sheets. Kind Code: A1 A dimensional change rate of a photosensitive organic component containing a (meth) acrylate compound represented by (1) and a urethane compound having an ethylenically unsaturated group and an inorganic powder as an essential component is 1 or more and 1 or more. A photosensitive ceramic composition having a molecular weight of not more than 0.5. CH 2 = CR 1 COO- (R 2 ) n -R 3 -R 0 where R 0 is CH 2 = CR 1 COO- (R 2 ) n —, a hydrogen atom or a halogen atom. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4685462-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100587461-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012513624-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005241931-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7274019-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006041241-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006208652-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4501460-B2 |
| priorityDate | 2002-04-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 95.