http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003286278-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f09378c018e7719f171f7e91f2dd60fd |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D317-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D317-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-032 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-06 |
| filingDate | 2002-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2e266f4cb3b8de826114f79c58113b74 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6b293a07ff4f0c4c20b1eaae7d560a96 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_588a86d133396d39386c3bea9b76959d |
| publicationDate | 2003-10-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2003286278-A |
| titleOfInvention | Methylene dioxolane compound, active energy ray composition and pattern forming method using the same |
| abstract | (57) [Problem] To provide a composition capable of forming a resist film excellent in active energy ray sensitivity. The methylene dioxolane compound or its derivative (A) contains 0.1 to 10 equivalents of carboxyl groups per kg of the polymer, and has a number average molecular weight in the range of 3,000 to 100,000 and a glass transition temperature of 0 ° C. or more. A) a polymer having at least 1 to 10 equivalents of hydroxyphenyl groups per kg of polymer and having a number average molecular weight in the range of 500 to 100,000 and a glass transition temperature of 0 ° C. or higher ( b) and a polymer containing at least 0.1 to 20 equivalents of hydroxyphenyl and carboxyl groups per kg of polymer and having a number average molecular weight in the range of 500 to 100,000 and a glass transition temperature of 0 ° C. or higher ( characterized by containing at least one polymer (B) selected from c) as an essential component. Active energy ray composition. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2016133073-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2018061512-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018061512-A1 |
| priorityDate | 2002-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 162.