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filingDate 2001-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2003-05-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2003146620-A
titleOfInvention Method for producing carbonyl difluoride
abstract PROBLEM TO BE SOLVED: To provide a method for producing carbonyl difluoride which is useful as a reagent for organic synthesis, a cleaning gas for semiconductor production equipment, an etching gas and the like. SOLUTION: In producing carbonyl difluoride by reacting carbon monoxide with metal fluoride, a step of reacting carbon monoxide and metal fluoride in the same reactor, The step of reacting metal fluoride and fluorine is alternately repeated. In particular, cobalt trifluoride or cerium tetrafluoride is used as the metal fluoride.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011510501-A
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