| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1e8ba6870e42607109689c74072ca5d3 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02C20-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P70-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2257-204 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-8659
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J23-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-8603 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J23-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-86 |
| filingDate |
2001-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9bada0546460f0a573f35c222f9e45ce
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e69ce3dc6efcf37fe47a51771dd08e9a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_44650558c287f974d8c8bfc6ca08c959
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_63380385f24fe44e496da01ef0701087 |
| publicationDate |
2003-05-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2003144843-A |
| titleOfInvention |
Decomposition agent and decomposition method for sulfur fluoride |
| abstract |
(57) Abstract: The sulfur fluoride such as SF 6 contained in exhaust gas discharged from a semiconductor manufacturing process or the like, without decomposing agent is inactivated in a short time, also sulfur oxides, fluoride Provided is a decomposition treatment agent and a decomposition treatment method capable of decomposing at a relatively low temperature of 1000 ° C. or less at a decomposition rate of 99.9% or more without discharging corrosive gas such as hydrogen. SOLUTION: A decomposition treating agent containing an aluminum compound and a lanthanoid compound as active ingredients, or a decomposition treating agent containing an aluminum compound, a lanthanoid compound and an alkaline earth metal compound as active ingredients. In addition, a gas containing sulfur fluoride is contacted with the decomposition treatment agent under heating to decompose sulfur fluoride, or after contacting with a treatment agent containing aluminum oxide as an active ingredient, oxidation of lanthanoids is performed. Contact with a treating agent containing an oxide of an alkaline earth metal as an active ingredient to decompose sulfur fluoride. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009268962-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2010101073-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2010101073-A1 |
| priorityDate |
2001-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |