| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7561838a3b924200a9a9d05aea639851 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67069
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B7-0071 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B5-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-02 |
| filingDate |
2001-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6246c5d7fc7518880b1d7ffc1c21afee |
| publicationDate |
2003-05-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2003126795-A |
| titleOfInvention |
Cleaning method of ceramic insulator |
| abstract |
[PROBLEMS] To provide an excellent cleaning effect on contaminated insulator parts in a dry etching apparatus, and to have a long life of expensive ceramic insulator parts without substantially damaging the ceramic insulator parts themselves. The present invention provides a method for cleaning a ceramic insulator capable of extending the length of the ceramic insulator. In order to achieve the above object, the present invention provides a method for forming an insulator part in a dry etching apparatus under an oxygen atmosphere under an oxygen atmosphere. A method for cleaning a ceramic insulator comprising calcining at ~ 1300 ° C. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016063226-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101793431-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006130434-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005000911-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009027104-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7254437-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009302401-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4615246-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4666576-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005319377-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7942975-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018026560-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005327929-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010207815-A |
| priorityDate |
2001-10-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |