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publicationDate 2003-04-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2003095625-A
titleOfInvention Method for producing carbon nanotube, carbon nanotube, and electron emission source
abstract (57) [Summary] [PROBLEMS] To efficiently produce carbon nanotubes. SOLUTION: A mixed gas of an aliphatic hydrocarbon having 1 to 5 carbon atoms and hydrogen or a mixed gas of an aromatic hydrocarbon and hydrogen is introduced into a reaction vessel 101 from a pipe 110, The AC power is supplied from an AC power supply 109 to the anode 102. A plasma is generated between the substrate 105 and the cathode 107, thereby generating and depositing carbon nanotubes on the substrate 105. At this time, the distance between the anode 102 and the substrate 105 is set to 1 Hold at a distance of 0 cm or less.
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