http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003042872-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f4a8faea375370b67c9d71e67db32bcd |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01L9-12 |
filingDate | 2001-07-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2c071f66f7ef6e4b973b97b23947f201 |
publicationDate | 2003-02-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2003042872-A |
titleOfInvention | Package for pressure detector |
abstract | (57) [Problem] To provide a pressure detecting device in which a bottom surface of a concave portion in which a first electrode is formed is not deformed, whereby an external pressure can be accurately detected. SOLUTION: A plurality of ceramic layers are laminated, A ceramic substrate 1 having a first concave portion 1a for accommodating the semiconductor element 3 on one main surface and a second concave portion 1b for forming a closed space S on the other main surface; 1b, a first metallized electrode 7 attached to the bottom surface of the first recess 1a of the ceramic base 1, and a ceramic plate 2; And a second metallized electrode 9 attached to the inner main surface of the pressure sensing device, the side surface of the first concave portion 1a is located closer to the outer periphery than the side surface of the second concave portion 1b. |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005134221-A |
priorityDate | 2001-07-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 18.