| abstract |
(57) Abstract: An antifouling coating for an antireflective surface, wherein the antifouling coating has a number average molecular weight of at least about 1000, Formula (I): R f -[-R 1 -SiY 3-x R 2 x ] y wherein R f is a monovalent or divalent polyfluoropolyether group; R 1 is a divalent alkylene group, an arylene group, or a combination thereof; R 2 is a lower alkyl group Y is a halide, lower alkoxy group, or lower acyloxy group; x is 0 or 1; and y is 1 or 2; and preferably, a coating composition of a fluorinated silane is applied. Is an anti-reflective coating containing the prepared fluorinated siloxane, particularly for the outer surface of an anti-reflective coating stack. |