http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002503031-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32871 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 |
| filingDate | 1999-02-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2002-01-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2002503031-A |
| titleOfInvention | Plasma-assisted processing chamber for individually controlling seed density |
| abstract | (57) SUMMARY The present invention provides a plasma assisted processing apparatus and method for a workpiece that separately controls a seed density in a processing plasma. The present invention has a processing chamber (102) and at least one auxiliary chamber (104). The auxiliary chamber is capable of generating an auxiliary plasma and transferring it to the processing chamber. To control the density of the particle species in the processing chamber, the present invention provides a filter (108) interposed between the auxiliary chamber and the processing chamber, a power supply for the main chamber, and a number of separate inputs to the processing chamber. Such auxiliary chambers, or a combination thereof. The auxiliary plasma may be filtered, combined with the plasma generated in the main chamber, combined with another auxiliary plasma, or a combination thereof to separate the density of the species of the processing plasma. May be controlled. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014057057-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111527583-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11171021-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015088456-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015526897-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10134605-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107424900-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10224221-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018029052-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111527583-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2021509525-A |
| priorityDate | 1998-02-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2244 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419556224 |
Total number of triples: 25.