http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002353192-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_47cc435e1d443f13180f7766df104d9d |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 |
| filingDate | 2001-05-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fe5ea923691ddf51f74b34b3731ef63b |
| publicationDate | 2002-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2002353192-A |
| titleOfInvention | Glass-like carbon chamber inner wall protection member |
| abstract | PROBLEM TO BE SOLVED: To provide a glass-like carbon chamber inner wall protection member which can prevent metal contamination due to erosion of an inner wall by plasma, fulfills a function necessary for stabilizing a process, and can be used for a long time. I will provide a. A glass-like carbon chamber inner wall protection member used in a plasma etching apparatus, wherein the glass-like carbon chamber inner wall protection member has an ash content of 50 ppm or less and a thermal conductivity of 5 W / m ยท K or more. |
| priorityDate | 2001-05-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 24.