http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002323759-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_dbdfa36b677f4ef61245ca725011e221 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B7-02 |
| filingDate | 2001-04-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_09edfa81f96f62d73c53e70fba23f719 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0e2825efdae08cc097278baa10495b80 |
| publicationDate | 2002-11-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2002323759-A |
| titleOfInvention | Photosensitive resin laminate |
| abstract | PROBLEM TO BE SOLVED: To provide a high resolution and a pattern shape faithful to a mask film, to reduce air voids when laminating a DFR on a substrate, and to laminate a protective layer on a photosensitive resin layer. When manufacturing the photosensitive resin laminate by doing, the photosensitive resin layer is easily adhered to the protective layer, especially in the resist pattern peeling step after electrolytic plating when applied to the semi-additive method, peeling residue hardly occurs Provided is a photosensitive resin laminate. SOLUTION: In a photosensitive resin laminate comprising a support, a photosensitive resin layer, and a protective layer, the thickness of the support is 10 μm to 30 μm, and the haze is 0.01% to 1.5%. And the protective layer has a thickness of 30 μm. Not less than 50 μm and the center line average roughness (Ra) is 0.1 μm. m. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2021010058-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7213981-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2021010058-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011043854-A |
| priorityDate | 2001-04-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 200.