http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002249586-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08J3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31 |
| filingDate | 2001-02-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_da6545edd6a5a7c89cf46b7c261aa517 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1ebf1df9bbe900788e1c9d1ccce0c3ad |
| publicationDate | 2002-09-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2002249586-A |
| titleOfInvention | Method for treating silicone rubber, silicone rubber and apparatus for semiconductor production |
| abstract | (57) [Problem] To reduce the amount of low molecular organic substances released from silicone rubber. In a semiconductor manufacturing apparatus using silicone rubber, the contamination by the organic substance is suppressed. SOLUTION: For example, after purchasing foamed silicone rubber, it is heated at a predetermined temperature and time in a heating room on a factory side of a semiconductor manufacturing equipment maker, so that a polymerization residue and a by-product of a raw material contained in the silicone rubber are removed. A low molecular organic substance such as a certain low molecular siloxane is gasified and released. The silicone rubber thus obtained does not easily release an organic gas that adversely affects the semiconductor device even when exposed to a high temperature again, and is preferably used as a seal member such as an opening / closing part or a joint part of a heat treatment apparatus in a semiconductor manufacturing apparatus. . |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110133978-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008259856-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108527735-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018146677-A |
| priorityDate | 2001-02-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 26.