| abstract |
(57) [Problem] To provide a plasma-resistant member capable of sufficiently withstanding plasma exposure and reducing cost. SOLUTION: This plasma resistant member is characterized in that at least a surface region exposed to plasma under a corrosive gas is formed of a metal layer of Group IIIA of the periodic table. Here, metals of Group IIIA of the periodic table are Y, La, Ce, N at least one of d, Sm, Eu, Gd, Dy, Ho, and Er, and the metal layer has a thickness of 10 to 20. About 0 μm is preferable. |