| abstract |
PROBLEM TO BE SOLVED: To provide a bonding layer having good airtightness, bonding strength and corrosion resistance, eliminating the problem of protrusion of a bonding material under high pressure at the time of bonding, and further improving the thermal conductivity of the bonded body. Accordingly, the present invention provides a bonding structure for an electrostatic chuck, which has a small deformation due to a temperature change and has a good flatness of an attraction surface, and a method of manufacturing the same. SOLUTION: This is a joining structure for an electrostatic chuck in which a ceramic electrostatic chuck member and a metal member are joined by a joining layer. The bonding layer 5 includes a first outermost bonding layer 1 bonded to the ceramic electrostatic chuck member, a second outermost bonding layer 2 bonded to the metal member, and a polyimide layer 3 between the outermost bonding layers. And each outermost bonding layer comprises a silicone layer or an acrylic layer. |