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publicationDate 2002-06-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2002172555-A
titleOfInvention Polishing base cloth and polishing method
abstract (57) Abstract: The magnetic recording when performing precision polishing of textured or the like on the surface of the medium or the like, abrasive group can be uniformly polished no deep grooves in the base plate surface (scratches) by variations in polishing conditions Providing cloth. SOLUTION: This is a fibrous base material composed of a fiber bundle formed by converging 20 or more ultrafine fibers and a base cloth which is a composite formed by filling a void with a polymer elastic material. Average diameter d1 of ultrafine fibers in a range of radius 1/2 from the center Is 0.3 to 10 μm, the average diameter d2 of the ultrafine fibers in the outer peripheral portion is 0.05 to 1 μm, and d1 is 1.5 of d2. A base fabric for polishing, wherein the weight ratio of the polymer elastic body to the fibrous base material is 10/90 or more.
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