| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1d29f7ac2c7f9be9f7dae1a83bbb5c92 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-322 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D1-835
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D3-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D17-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
| filingDate |
2000-09-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4a9b52098a00b7c82fa1f650a3b8dba0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8b3e8742dab489784c2fa24334ca40ec
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_44eddf5d499ea0aecd3221c0354bd9df |
| publicationDate |
2002-06-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2002169299-A |
| titleOfInvention |
Photoresist developer |
| abstract |
PROBLEM TO BE SOLVED: To provide a photoresist after exposure having excellent wettability of a non-soluble portion, excellent solubility of a soluble portion, and effectively suppressed the dissolution rate of the non-soluble portion. A photoresist developer is provided. A nonionic surfactant and a cationic surfactant are added to an aqueous alkaline solution in an amount of 10 to 5000 ppm by weight. The above-mentioned photoresist developer is prepared by incorporating the above-mentioned photoresist developer in a concentration. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015178375-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8808976-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2015178375-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008310315-A |
| priorityDate |
2000-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |