http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002151490-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-507 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31 |
| filingDate | 2000-10-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_807768652c47da95df579019da5fbd62 |
| publicationDate | 2002-05-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2002151490-A |
| titleOfInvention | Plasma film forming equipment |
| abstract | [PROBLEMS] To provide a plasma film forming apparatus capable of reducing a reaction by-product generated in plasma film forming. SOLUTION: A plasma film forming apparatus 1 includes a reaction chamber 2 , Coil 12, AC power supply 14, first coupling circuit 1 0 and a second coupling circuit 11. The coil 12 is 1 Or it is wound around the reaction chamber 2 more times. AC power supply 14 is provided to provide power to coil 12. The first coupling circuit 10 includes a coil 1 2 is a capacitive circuit that capacitively couples the reference potential line 32 and the reference potential line 32. The first coupling circuit 10 serves to reduce the potential generated at one end and the other end of the coil in the chamber. The second coupling circuit 11 is an inductive circuit that inductively couples the coil 12 and the AC power supply 14s. by this, The impedance change due to the addition of the first coupling circuit 10 can be adjusted by the second coupling circuit 11. |
| priorityDate | 2000-10-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 25.