http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002141305-A

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0950e9df7f0e1b73efee1bda859951ad
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-405
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76868
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76874
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76877
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76873
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76867
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-288
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2855
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D7-123
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-165
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1653
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1651
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C28-00
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-288
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D7-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C28-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D5-34
filingDate 2000-11-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8565c7dcab5dd9f93c2d136c5f6496c8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f199cc14489661f0e4fca0ae29751317
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8270b7b2bfac34cfd8067d3ee13ad26c
publicationDate 2002-05-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2002141305-A
titleOfInvention Method for manufacturing semiconductor device
abstract (57) Abstract: A Cu film having a good buried shape is formed inside a wiring groove and a connection hole by electrolytic plating. A seed layer is formed on the inner wall of the wiring groove and the connection hole as a seed layer. Copper palladium alloy film 5 is formed, and then a copper film 6 complementing the function of the copper palladium alloy film 5 as a seed layer Is formed on the copper-palladium alloy film 5 by electroless plating, and then C is used as a wiring on the copper film 6 by electrolytic plating. A u film 7 is formed.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9935363-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009016980-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013543661-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7022598-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013243408-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007027460-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009016979-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8394508-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008541428-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006513325-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8163400-B2
priorityDate 2000-11-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23985
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23995
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23963
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID482532689
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458431511
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419558592
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419577474
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458391437
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559477
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23939
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23964
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID104730
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID935
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425762086
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID416641266
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23986
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23956
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23938
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23978
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559021
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID418354341
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID412550040

Total number of triples: 67.